Published February 24, 2005 | Version v1
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Method to grow carbon thin films consisting entirely of diamond grains 3-5 nm in size and high-energy grain boundaries

  • 1. Argonne National Laboratory

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Description

An ultrananocrystalline diamond (UNCD) having an average grain size between 3 and 5 nanometers (nm) with not more than about 8% by volume diamond having an average grain size larger than 10 nm. A method of manufacturing UNCD film is also disclosed in which a vapor of acetylene and hydrogen in an inert gas other than He wherein the volume ratio of acetylene to hydrogen is greater than 0.35 and less than 0.85, with the balance being an inert gas, is subjected to a suitable amount of energy to fragment at least some of the acetylene to form a UNCD film having an average grain size of 3 to 5 nm with not more than about 8% by volume diamond having an average grain size larger than 10 nm.

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Additional details

Identifiers

Patent application number
US 84586704 A
Patent number
US 2005/0042161 A1
Other
oai:uchicago.tind.io:7785

Dates

Patent filed
2004-05-13

UChicago Information

Division(s)
Physical Sciences Division
Department(s)
Physics