Published October 13, 2016
| Version v1
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THREE DIMENSIONAL BLOCK-COPOLYMER FILMS FORMED BY ELECTROHYDRODYNAMIC JET PRINTING AND SELF-ASSEMBLY
Creators
- 1. University of Wisconsin-Madison
- 2. University of Illinois Urbana-Champaign
- 3. University of Chicago
Description
Provided are methods of patterning block copolymer (BCP) films with independent control of the size, periodicity and morphology of the resulting nanoscale domains. Also disclosed are BCP patterns having discrete areas of different self-assembled BCP thin films on a surface, the BCP thin films differing in one or more of molecular weight (MW), composition, morphology, and feature size. In some implementations, multiple BCPs with different MWs can be printed onto a single substrate, thereby providing access to patterns with diverse geometries and feature sizes. The printing approaches can be applied to various BCP chemistries, morphologies and directed self-assembly (DSA) strategies. Also provided are methods of forming BCP thin films on patterns of polymer brushes formed by electrohydrodynamic printing. The methods involve direct, high resolution electrohydrodynamic delivery of random copolymer brushes as surface wetting layers to control the geometries of nanoscale domains in spin-cast and printed BCPs.
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US20160297986.pdf
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Additional details
Identifiers
- Patent application number
- US 201415043048 A
- Patent number
- US 2016/0297986 A1
- Other
- oai:uchicago.tind.io:9491
Dates
- Patent filed
-
2014-08-14