Published June 15, 2006
| Version v1
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Method to grow carbon thin films consisting entirely of diamond grains 3-5 nm in size and high-energy grain boundaries
- 1. Argonne National Laboratory
Description
An ultrananocrystalline diamond (UNCD) having an average grain size between 3 and 5 nanometers (nm) with not more than about 8% by volume diamond having an average grain size larger than 10 nm. A method of manufacturing UNCD film is also disclosed in which a vapor of acetylene and hydrogen in an inert gas other than He wherein the volume ratio of acetylene to hydrogen is greater than 0.35 and less than 0.85, with the balance being an inert gas, is subjected to a suitable amount of energy to fragment at least some of the acetylene to form a UNCD film having an average grain size of 3 to 5 nm with not more than about 8% by volume diamond having an average grain size larger than 10 nm.
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Additional details
Identifiers
- Patent application number
- US 35000506 A
- Patent number
- US 2006/0127300 A1
- Other
- oai:uchicago.tind.io:8542
Dates
- Patent filed
-
2006-02-08